| 用体硅微加工工艺实现的微纳电械系统 |
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| 引用本文： | Masayoshi Esashi,Takahito Ono. 用体硅微加工工艺实现的微纳电械系统[J]. 光学精密工程, 2002, 10(6) |
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| 作者姓名： | Masayoshi Esashi Takahito Ono |
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| 作者单位： | New Industry Creation Hatchery Center (NICHe)，Graduate School of Engineering，Tohoku University Sendai Tohoku University，980-8579 |
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| 摘 要： | 1 Ｉｎｔｒｏｄｕｃｔｉｏｎ ＭＥＭＳ (ＭｉｃｒｏＥｌｅｃｔｒｏＭｅｃｈａｎｉｃａｌＳｙｓｔｅｍ )ｂａｓｅｄｏｎｓｅｍｉｃｏｎｄｕｃｔｏｒｍｉｃｒｏｆａｂｒｉｃａｔｉｏｎｐｌａｙｓｉｍ ｐｏｒｔａｎｔｒｏｌｅｓｆｏｒｅｘａｍｐｌｅｉｎｔｈｅ ｐｅｒｉｐｈｅｒｙｏｆＩＴｓｙｓｔｅｍｓ.ＮＥＭＳ (ＮａｎｏＥｌｅｃｔｒｏＭｅｃｈａｎｉｃａｌＳｙｓ ｔｅｍ)ｃｏｎｔａｉｎｓｎａｎｏ＿ｓｃａｌｅｓｔｒｕｃｔｕｒｅｓ.Ｓｏｐｈｉｓｔｉｃａｔｅｄａｎｄｈｉｇｈｐｅｒｆｏｒｍａｎｃｅｓｙｓｔｅｍｓｂａｓｅｄｏｎｔｈ…
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Micro-nano electromechanical system by bulk silicon micromachining |
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| Masayoshi Esashi,Takahito Ono. Micro-nano electromechanical system by bulk silicon micromachining[J]. Optics and Precision Engineering, 2002, 10(6) |
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| Authors: | Masayoshi Esashi Takahito Ono |
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| Abstract: | 1 Introduction MEMS (Micro ElectroMechanical System) based on semiconductor microfabrication plays important roles for example in the periphery of IT systems. NEMS (Nano ElectroMechanical System) contains nano-scale structures. Sophisticated and high performance systems based on the MEMS and the NEMS have been developed. Packaging and electrical interconnection play an important role in realizing practically applicable systems[1]. |
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