Pulsed breakdown of 4H-SiC Schottky diodes terminated with a boron-implanted p-n junction |
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Authors: | P. A. Ivanov I. V. Grekhov A. S. Potapov T. P. Samsonova |
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Affiliation: | (1) Ioffe Physicotechnical Institute, Russian Academy of Sciences, St. Petersburg, 194021, Russia |
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Abstract: | Pulsed reverse current-voltage characteristics have been measured in the breakdown region for 1-kV 4H-SiC Schottky diodes terminated with a boron-implanted p-n junction. It was shown that the dynamic breakdown voltage of the diodes increases as the pulses become shorter. Owing to the homogeneous avalanche formation at the edge of the guard p-n junction and to the high differential resistance in the breakdown region, the diodes sustain without degradation a pulsed reverse voltage substantially exceeding the static breakdown threshold. Characteristic features of the pulsed breakdown are considered in relation to the specific properties of the boron-implanted guard p-n junction. |
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