Advanced control strategy for a digital mass flow controller

Mass flow controllers are complex mechatronic devices, the design of which involves many techniques and skills in various scientific domains. Due to the slow response time of the sensors embedded in such devices, it is critically important to control gas flow variations in processes used in semiconductor industry. This paper shows how a digital controller for MFCs can be mathematically computed once the dynamic characteristics of the open-loop system have been identified. The proposed control method goes beyond prior art control methods as it explicitly takes into account the dynamics of the sensor, computes the digital controller appropriate to the order of the open-loop model and imposes a desired closed-loop transient response. The simulations performed and experimental results obtained with this new type of digital controller were very promising.