微机电系统在电子信息领域的应用

借助于当代先进的大规模集成电路制造工艺，MEMS（微机电系统）技术将多种光、机、电功能器件集成于一体，真正实现了传统意义上的光机电一体化、微型化、数字化和智能化，在汽车工业、航空航天、消费电子等领域得到了越来越广泛的应用，实现了电子信息技术的新飞越。文中主要阐述MEMS在基础电子元器件、通信、汽车电子、消费电子等电子信息领域的发展应用。

Application of MEMS to Electronic Information

With the help of advanced large-scale IC manufacturing technology, MEMS integrated various optical, mechanical, electrical components and realized traditional optical-mechanical-electrical integration, miniatwrization, digitization and intelligentization, thus, presentng a new stage in electronic information field and is more and more applied in automotive industry, aerospace and consumptive electronics. This paper mainly describes MEMS system development and application in such electronic information fields as basic electronic component, communication, automotive electronics and consumptive electronics.