| 强磁场增强反应离子腐蚀实验研究 |
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| 引用本文： | 袁明文. 强磁场增强反应离子腐蚀实验研究[J]. 微纳电子技术, 1996, 0(1) |
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| 作者姓名： | 袁明文 |
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| 作者单位： | 石家庄电子部第１３研究所 |
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| 摘 要： | 介绍强磁场增强反应离子腐蚀实验的研究结果，其中包括不同材料的腐蚀速度与磁场的关系以及负载效应等。
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| 关 键 词： | 等离子体，腐蚀 |
Experimental Research of Higher Magnetically Enhanced Reactive Ion Etching |
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| Yuan Mingwen. Experimental Research of Higher Magnetically Enhanced Reactive Ion Etching[J]. Micronanoelectronic Technology, 1996, 0(1) |
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| Authors: | Yuan Mingwen |
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| Abstract: | The experimental results of higher magnetically enhanced reactive ion etching,including load effects and dependence of etch rate on magnetical hield for various materials are described. |
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| Keywords: | Plasma Etching |
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