Passive polarization converter in SiON technology

A passive polarization converter has been realized in silicon oxynitride (SiON) technology. The device is a grating assisted codirectional coupler consisting of segments of asymmetrically etched ridge waveguides. By using a double-masking technique, the fabrication of the device is tolerant with respect to the alignment of the required masks. Conversion efficiencies up to 0.98 (TE→TM and TM→TE) and insertion losses of 3 dB/cm have been measured. Using 2-D beam propagation method simulations, an observed beat pattern in the converter could be explained as due to a leaky mode, which is captured in the grating structure