| 一种对微型元件行之有效的力学量检测方法 |
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| 引用本文： | 陈锵,王琪民,单保祥,杨浩涌. 一种对微型元件行之有效的力学量检测方法[J]. 机械, 2000, 27(4): 36-38,43 |
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| 作者姓名： | 陈锵 王琪民 单保祥 杨浩涌 |
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| 作者单位： | 中国科技大学,合肥,230026 |
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| 基金项目： | 国家自然科学基金资助项目! (No .1 9672 0 62 ) |
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| 摘 要： | 论述了对微型结构（微型触觉传感器敏感单元）的静态，动态加载方法和用光纤式麦克尔迩干涉仪对其力学参数（应变，固有频率，振型等）的检测方法，并与有限元计算做了对比，通过结果比较和误差分析，为微型触觉传感器敏感单元的优化设计和应用提供依据和支持。
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| 关 键 词： | 微型机械 微型元件 力学量检测方法 |
An Effectual Method for Mechanical Parameters' Testing of Micro-structure |
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| CHEN Qiang WANG Qi min SHAN Bao xiang et al.. An Effectual Method for Mechanical Parameters' Testing of Micro-structure[J]. Machinery, 2000, 27(4): 36-38,43 |
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| Authors: | CHEN Qiang WANG Qi min SHAN Bao xiang et al. |
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| Abstract: | This paper gives a way to perform the static and dynamic loading on the sensitive cell of micro tactile sensor (the E type square film) and a method for mechanical parameters' testing of it by using the optical fiber Michelson interferometer(such as strain, natural frequencies, modal etc). Comparison of results (experimental results and FEM's) and analysis of errors provide support for the optimization design and application of the sensitive cell of the micro tactile sensor. |
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| Keywords: | micro stucture Finite Element Method(FEM) static properties dynamic properties optical fiber |
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