Step-transition perturbation approach for pixel-structured nonparaxial diffractive elements |
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Authors: | Vallius Tuomas Kuittinen Markku Turunen Jari Kettunen Ville |
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Affiliation: | Department of Physics, University of Joensuu, Finland. |
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Abstract: | An extension of an approximate step-transition perturbation method is presented that permits numerically efficient diffraction analysis of pixel-structured surface profiles in the nonparaxial domain. Comparison with the rigorous diffraction theory of gratings shows that the method is reasonably accurate provided that the pixel size exceeds approximately two wavelengths even if the structure contains isolated pixels. |
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