| 微空心阴极放电与准分子光源 |
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| 引用本文： | 江超,王又青. 微空心阴极放电与准分子光源[J]. 量子电子学报, 2005, 22(2): 142-149 |
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| 作者姓名： | 江超 王又青 |
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| 作者单位： | 1. 华中科技大学激光技术国家重点实验室,湖北,武汉,430074;湖北师范学院物理系,湖北,黄石,435002
2. 华中科技大学激光技术国家重点实验室,湖北,武汉,430074 |
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| 基金项目： | 湖北师范学院校科研和教改项目 |
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| 摘 要： | 微空心阴极放电是一种新颖的、非平衡、高气压辉光放电.综述了微空心阴极放电的基本原理;详细论述了微空心阴极放电中的准分子辐射,以及微空心阴极放电的放电方式(直流放电、脉冲放电、射频放电)对准分子辐射强度和效率的影响;最后论述了微空心阴极放电的运行方式(串联运行、并联运行)对准分子辐射的影响.
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| 关 键 词： | 激光技术 微空心阴极放电 准分子辐射 光谱光学 |
| 文章编号： | 1007-5461(2005)02-0142-08 |
| 收稿时间： | 2003-12-01 |
| 修稿时间： | 2003-12-01 |
Microhollow cathode discharge and excimer light source |
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| JIANG Chao,WANG You-qing. Microhollow cathode discharge and excimer light source[J]. Chinese Journal of Quantum Electronics, 2005, 22(2): 142-149 |
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| Authors: | JIANG Chao WANG You-qing |
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| Abstract: | Microhollow cathode discharge (MHCD) is a novel, nonequilibrium, high-pressure, direct current glow discharge. An overview of the research progress on the foundational theory of the MHCD was presented. The excimer radiation from the MHCD is discussed in particular, and then discharge mode (dc discharge, pulse dc discharge, RF discharge) effect to the intensity and the efficiency of excimer radiation is elucidated. The operation way (operation in series, operation in parallel) of the MHCD effect to excimer radiation is also discussed finally. |
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| Keywords: | laser techniques MHCD excimer radiation spectrum optics |
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