基于虚拟仪器的分子泵抽速自动测试软件设计

针对当前分子泵抽速测试装置自动化程度低,压强实验点难以调节等问题,设计出一套分子泵抽速自动测试软件,以LabVIEW为软件开发平台,采用RS485通信实现对真空计、气体质量流量控制计、温度控制仪的数据采集和设备控制;采用PID控制方法调节气体质量流量控制计的通气量,实现对压强实验点的稳定控制;采用继电型PID参数自整定技术提高算法对系统的适应性、该软件提高了分子泵抽速测量工作中数据采集和压强调节的自动化程度,减少了人员操作对测量过程的影响,使测试过程更加科学规范,对分子泵抽速测试技术研究和应用具有一定参考价值。

Automatic Pumping Speed Measurement of Molecular Pump: An Instrumentation Study

The automatic pumping-speed measurement technique was developed for turbo molecular vacuum pump.The self-designed software was compiled on the basis of LabVIEW platform and the hardware included a host computer,a RS485 interface converter,a PID control circuit capable of controlling the pressure gauge,gas flow-rate and environment temperature.The new pumping-speed measurement scheme was tested with a typical molecular pump by pumping N₂ gas in the pressure range of interest.The test results show that when it comes to measurement of pumping speed in real time,the newly-developed automatic technique outperforms the conventional manual evaluation method because of higher precision,better automation,easier operation,greater stability/reliability,stronger robustness,faster measurement/analysis and less human impact.We suggest that the novel automatic pumping speed measurement scheme be of some technological interest in industrial application and/or automation of molecular vacuum pump.