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用水分子质谱仪进行电容器真空浸渍过程终点判断的研究
引用本文:于胜斌,乔保振,于清明,张保国,王英武,乔木. 用水分子质谱仪进行电容器真空浸渍过程终点判断的研究[J]. 真空, 2020, 0(1): 11-16
作者姓名:于胜斌  乔保振  于清明  张保国  王英武  乔木
作者单位:中国启源工程设计研究院有限公司;沈阳诚桥真空设备有限公司
摘    要:如何在保证电容器真空浸渍质量的前提下,尽量缩短抽真空时间、降低成本,是各个电容器生产厂家非常关注的问题。长期以来,由于没有客观的测量数据对真空浸渍终点进行有效判断,往往使得抽真空阶段时间无故延长。本文介绍一种最新研制成果水分子质谱仪,可测量和计算出被抽气体水蒸气分子的个数。从分子量级,对电容器真空浸渍终点进行判断,从而实现对真浸过程的终了时间进行准确有效地判断。

关 键 词:真空浸渍  真空终点判断  质谱  残余气体  水质谱仪

Study on the Endpoint Judgment for Capacitor Vacuum Immersion Process by Using Water Molecular Mass Spectrometer
YU Sheng-bin,QIAO Bao-zhen,YU Qing-ming,ZHANG Bao-guo,WANG Ying-wu,QIAO Mu. Study on the Endpoint Judgment for Capacitor Vacuum Immersion Process by Using Water Molecular Mass Spectrometer[J]. Vacuum(China), 2020, 0(1): 11-16
Authors:YU Sheng-bin  QIAO Bao-zhen  YU Qing-ming  ZHANG Bao-guo  WANG Ying-wu  QIAO Mu
Affiliation:(China Qiyuan Engineering Corpoertion,Xi'an 710018,China;Shenyang Chengqiao Vacuum Equipment Co.,Ltd.,Shenyang 110025,China)
Abstract:How to shorten the pumping time and reduce the cost under the premise of ensuring the vacuum impregnation quality of capacitors is a problem that every capacitor manufacturer pays close attention to.For a long time,because there is no objective measurement data to effectively judge the vacuum impregnation end point,the vacuuming stage time is often prolonged.This paper describes the development results of a water molecular mass spectrometer.From the molecular weight level,the vacuum impregnation endpoint of the capacitor was judged.The number of vapor molecules of the pumped gas can be measured and calculated,and thereby achieving an accurate and effective judgment of the endpoint of the vacuum immersion process.
Keywords:vacuum impregnation  vacuum endpoint determination  mass spectrometry  residual gas  water mass spectrometer
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