| 氯硅烷填料式冷凝储存设备的应用探索 |
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| 作者单位： | ;1.云南省光电子硅材料制备技术企业重点实验室;2.昆明冶研新材料股份有限公司 |
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| 摘 要： | 在多晶硅生产中,应用填料式氯硅烷冷凝储存设备对含氯硅烷的尾气进行回收。该冷凝储存设备可以起到一定的除杂作用,提高冷媒冷量的利用率,降低设备的制造成本,最终降低尾气中氯硅烷的回收成本。同时,还起到一定的精馏提纯作用。设备主要由冷凝器、储存罐、填料式塔板以及相应的控制系统组成,通过DCS控制系统实现自动控制。
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| 关 键 词： | 填料式 冷凝储存 氯硅烷 |
Applied Research on Condensate Storage Devices of Chlorosilane Packing Type |
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| Affiliation: | ,Key Laboratory of Silicon Materials Preparation optoelectronic technology companies in Yunnan,Kunming Metallurgical Institute New Materials Co,Ltd |
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| Abstract: | In polysilicon production,packing type of chlorosilane condensate storage devices for exhaust gas recycling containing chlorosilane applied. The condensate storage devices can play a role in removing impurity,improve the utilization rate of refrigerant cooling capacity,reduce the manufacturing cost of the equipment and ultimately reduce the chlorosilane in tail gas recovery cost. At the same time,also have certain rectification column purification effect. Equipment is mainly composed of the condenser,storage tanks,packing type plate and the corresponding control system,through the DCS control system automatic control was realized. |
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| Keywords: | packing type condensate storage chlorosilane |
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