| 制备软X光多层膜的转速控厚法 |
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| 引用本文： | 邵建达,范正修,金磊,郭永洪. 制备软X光多层膜的转速控厚法[J]. 中国激光, 1991, 18(3): 171-175 |
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| 作者姓名： | 邵建达 范正修 金磊 郭永洪 |
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| 作者单位： | 中国科学院上海光机所 201800(邵建达，范正修，金磊)，中国科学院上海光机所 201800(郭永洪) |
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| 摘 要： | 本文提出了一种新的监控软X光多层膜膜厚的方法——转速控厚法,利用这种方法镀制的设计周期厚度分别为8.4和10nm,周期数达50对和30对的W/C多层膜,经小角X光衍射测试,结果表明周期厚度随机误差在0.1nm左右。
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| 关 键 词： | 膜厚监控 转速控厚法 软X光多层膜 周期厚度随机误差 |
| 收稿时间： | 1990-06-18 |
Rotation-speed-controlled layer thickness of soft X-ray multilayer reflectors |
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| Shao Jianda,Fan Zhenxiu,Jin Lei,Guo Yonghong. Rotation-speed-controlled layer thickness of soft X-ray multilayer reflectors[J]. Chinese Journal of Lasers, 1991, 18(3): 171-175 |
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| Authors: | Shao Jianda Fan Zhenxiu Jin Lei Guo Yonghong |
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| Abstract: | Reported here is a new technique, rotation speed-controlled layer thickness monitoring, which can accurately monitor very thin layers for soft X-ray mirrors. Three W/C multilayer (d=10 nm,30 periods and d=8.4nm, 50 periods)are fabricated and characterized by low -angle X-ray diffraction. The results show that the random error of the periodic thicknessis being about 0.1nm. |
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| Keywords: | Layer thickness monitor rotation speed-controlled thickness monitor soft X-ray multilayer random errors of periodic thickness |
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