Ion bombardment in electron microscopy investigations

Transmission electron microscopy, transmission high energy electron diffraction, reflection high energy electron diffraction and scanning electron microscopy were employed to evaluate the possibilities of ion bombardment used in the preparation of electron microscope specimens. The experimental results show that the uncontrolled use of ion bombardment for thinning of metal foils, cleaning layers or crystal surfaces etc. may often lead to incorrect interpretation of the electron microscopy investigations. In contrast, it is stressed that controlled ion bombardment directly in the column of the electron microscope is a very useful method for the observation and study of some very interesting phenomena which occur to the structure of the specimens during ion bombardment.