声光式外差干涉仪的光路设计与分析

制造业的发展迫切需要对高速加工过程中的物体进行测量和定位,利用声光调制法实现外差干涉能产生较高的频差可以实现高速测量.文中对声光式外差干涉仪的光路设计进行了分析,提出了空间分离一级衍射光和零级衍射光的一种方案,并且对光拍频的接收,光路的调整进行了分析,实验结果证明该实验系统可以用于外差干涉测量.

Analysis and design of acousto optic heterodyne interferometer

Development of manufacturing industry urgently needs to measurement and location the objects in high speed machining processes. The acousto-optic modulator can generate high frequency difference, so we can achieve high speed measurement by introducing acousto-optic modulator into heterodyne interferometer. Optical design of acousto-optic heterodyne interferometer has been analyzed in this article. A scheme was proposed to realize the space isolation of the first diffraction light and zero-order diffraction light. The analysis of light beat reception and optical adjustment has been done. Test result proved the project can be used for heterodyne interferometer measurement.