| Preparation of Ultra—fine Aluminum Nitride in Thermal Plasma |
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| 引用本文： | 漆继红,罗义文,印永祥,代晓雁.Preparation of Ultra—fine Aluminum Nitride in Thermal Plasma[J].等离子体科学和技术,2002,4(4):1417-1420. |
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| 作者姓名： | 漆继红 罗义文 印永祥 代晓雁 |
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| 作者单位： | SchoolofchemicalengineeringofSichuanUniversity,Chengdu610065,China |
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| 基金项目： | This work was supported by Science and Technology Innovation Fund of Middle-Minor Enterprises from Ministy of Science and Technology. |
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| 摘 要： | Ultra-fine aluminum nitride has been synthesized by the evaporation of aluminum powder at atmospheric-pressure nitrogen plasma in a hot-wall reactor.The average size of aluminum nitride particle is 0.11μm measured by scanning electric mirror(SEM),and the purity is at least over90% evaluated by X-Ray diffraction(XRD).The conversion of Al powder to aluminum nitride is strongly depended on the injection of NH3.Typical experimental parameters such as the feed rate of raw material,the flow rate of ammonia and the position of injecting aluminum powder into the reactor are given.
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| 关 键 词： | 高温等离子体 超精细氮化铝 合成法 |
Preparation of Ultra-fine Aluminum Nitride in Thermal Plasma |
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| QI Ji-hong LUO Yi-wen YIN Yong-xiangDAI Xiao-yanSchool of chemical engineering of Sichuan university,Chengdu ,China.Preparation of Ultra-fine Aluminum Nitride in Thermal Plasma[J].Plasma Science & Technology,2002,4(4):1417-1420. |
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| Authors: | QI Ji-hong LUO Yi-wen YIN Yong-xiangDAI Xiao-yanSchool of chemical engineering of Sichuan university Chengdu China |
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| Affiliation: | QI Ji-hong LUO Yi-wen YIN Yong-xiangDAI Xiao-yanSchool of chemical engineering of Sichuan university,Chengdu 610065,China |
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| Abstract: | Ultra-fine aluminum nitride has been synthesized by the evaporation of aluminum powder at atmospheric-pressure nitrogen plasma in a hot-wall reactor. The average size of aluminum nitride particle is 0.11μm measured by scanning electric mirror (SEM), and the purity is at least over 90% evaluated by X-Ray diffraction (XRD). The conversion of Al powder to aluminum nitride is strongly depended on the injection of NH3. Typical experimental parameters such as the feed rate of raw material, the flow rate of ammonia and the position of injecting aluminum powder into the reactor are given. |
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| Keywords: | thermal plasma ultra-fine aluminum nitride |
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