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UV laser ablation of parylene films from gold substrates
Authors:O.?R.?Musaev,P.?Scott,J.?M.?Wrobel  author-information"  >  author-information__contact u-icon-before"  >  mailto:wrobelj@umkc.edu"   title="  wrobelj@umkc.edu"   itemprop="  email"   data-track="  click"   data-track-action="  Email author"   data-track-label="  "  >Email author,J.?A.?Wolf,M.?B.?Kruger
Affiliation:(1) Department of Physics, University of Missouri-Kansas City, Kansas City, MO 64110, USA;(2) National Nuclear Security Administration’s Kansas City Plant, Kansas City, MO 64141, USA;
Abstract:Parylene coatings on gold substrates were removed by laser ablation using 248-nm light from an excimer laser. Each sample was processed by a different number of pulses in one of three environments: air at atmospheric pressure, nitrogen at atmospheric pressure, and vacuum. The laser-induced craters were analyzed by optical microscopy and X-ray photoelectron spectroscopy. Multi-pulse ablation thresholds of gold and parylene were determined.
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