| 微电子器件可靠性研究与展望 |
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| 作者单位： | The 13th Institute，Ministry of EI，Shijiazhuang，050051 |
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| 摘 要： | 本文扼要介绍了近５年来我国在微电子器件（半导体分立器件及集成电路）可靠性研究方面所取得的进展与成果及存在的问题。预计今后５～１０年内，我国微电子器件可靠性研究工作将在５个方面展开，器件可靠性水平将提高１～２个数量级。
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| 关 键 词： | 可靠性，失效模式，失效机理 |
Research and Prospect on Reliability of Microelectronic DeVices |
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| Authors: | Wang Changhe |
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| Abstract: | The paper gives a brief introduction to important research achieve-ments on reliability of microelectronic devices and the existing problems over the past five years,It is forecasted that the research will be performed in five fields in the near future.The reliability will be improved by one or two order of magnitude. |
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| Keywords: | Reliability Failure mode Failure mechanism |
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