| 负偏压对DLC薄膜结构和摩擦学性能的影响 |
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| 引用本文： | 王智,宋红霞,刘建立,张平余,张玉娟.负偏压对DLC薄膜结构和摩擦学性能的影响[J].润滑与密封,2007,32(11):86-90. |
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| 作者姓名： | 王智 宋红霞 刘建立 张平余 张玉娟 |
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| 作者单位： | 河南大学特种功能材料教育部重点实验室,河南开封,475004;河北建材职业技术学院,河北秦皇岛,066004 |
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| 基金项目： | 国家自然科学基金;河南省高等学校杰出人才创新工程项目 |
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| 摘 要： | 采用离子束溅射沉积镀膜法制备了DLC薄膜,研究了偏压对薄膜性能的影响。通过原子力显微镜(AFM)和拉曼光谱对DLC薄膜的表面形貌以及内部结构进行了分析表征。并用UTM-2摩擦磨损仪对其摩擦学性能进行了测试。结果表明,利用离子束溅射沉积制备的DLC薄膜具有良好的减摩抗磨性能。随着偏压的增加薄膜的摩擦因数先减小后增加,在-150 V偏压时,薄膜的摩擦学性能最好。
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| 关 键 词： | DLC薄膜 离子束溅射沉积 负偏压 摩擦学性能 |
| 文章编号： | 0254-0150（2007）11-086-5 |
| 修稿时间： | 2007-08-01 |
Effects of Negative Bias on the Structure and Properties of DLC Films |
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| Wang Zhi,Song Hongxia,Liu Jianli,Zhang Pingyu,Zhang Yujuan.Effects of Negative Bias on the Structure and Properties of DLC Films[J].Lubrication Engineering,2007,32(11):86-90. |
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| Authors: | Wang Zhi Song Hongxia Liu Jianli Zhang Pingyu Zhang Yujuan |
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| Affiliation: | 1. Key Laboratory for Special Function Materials of Ministry of Education, Henan University, Kaifeng Henan 475004, China; 2. Hebei Vocational and Technical College of Building Materials,Qinhuangdao Hebei 066004, China |
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| Abstract: | Diamond-like carbon films(DLC films) were prepared by ion beam sputtering deposition and the effects of the bias on the properties of the films were studied.The surface topography and microstructure of the films were measured by AFM and visible Raman spectroscopy.The friction and wear behavior of the DLC films sliding against stainless steel was examined on UTM-2.The results show that DLC films prepared by ion beam sputtering deposition have good friction-reducing and wear resistant.With the increase of negative bias,the coefficient of friction decreases first and then increases.DLC film deposited under negative bias of-150 V is superior to others. |
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| Keywords: | DLC films ion beam sputtering deposition negative bias tribological properties |
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