| 谐振式MEMS磁传感器接口电路设计 |
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| 引用本文： | 高华磊,徐德辉,刘松,马颖蕾,熊斌. 谐振式MEMS磁传感器接口电路设计[J]. 传感器与微系统, 2016, 0(11). DOI: 10.13873/J.1000-9787(2016)11-0087-03 |
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| 作者姓名： | 高华磊 徐德辉 刘松 马颖蕾 熊斌 |
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| 作者单位： | 中国科学院 上海微系统与信息技术研究所,上海,200050 |
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| 基金项目： | 国家自然科学基金资助项目(51577186，51306200)。 |
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| 摘 要： | 介绍了一种谐振式微系统（MEMS）磁传感器的接口电路，电路由驱动电路和信号检测处理电路组成。驱动电路采用直接数字频率合成器（DDS）产生磁传感器驱动信号，同时为检测电路提供同步信号；信号检测处理电路对磁传感器输出信号和 DDS 产生的同步信号进行同步解调，最终得到所需的磁场信号。最后对电路的性能和测试结果进行分析和总结。
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| 关 键 词： | 微系统磁传感器 直接数字频率合成器驱动 同步解调 接口电路 |
Design of resonant MEMS magnetic sensor interface circuit |
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| GAO Hua-lei,XU De-hui,LIU Song,MA Ying-lei,XIONG Bin. Design of resonant MEMS magnetic sensor interface circuit[J]. Transducer and Microsystem Technology, 2016, 0(11). DOI: 10.13873/J.1000-9787(2016)11-0087-03 |
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| Authors: | GAO Hua-lei XU De-hui LIU Song MA Ying-lei XIONG Bin |
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| Abstract: | An interface circuit for resonant MEMS magnetic sensor is introduced,the circuit is composed of driving circuit and signal detection and processing circuit. Driving circuit uses direct digital frequency synthesizer (DDS)to generate magnetic sensor driving signal. At the same time,it provides synchronizing signal for detection circuit. Signal detection and processing circuit demodulates output signal of magnetic sensor and synchronizing signal generated by DDS. Finally,magnetic field signal needed is obtained. Characteristics of circuit and results of test are analyzed. |
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| Keywords: | MEMS magnetic sensor direct digital frequency synthesizer( DDS ) drive synchronous demodulation interface circuit |
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