MEMS执行机构在微小力传感器量值溯源中的应用

对一种基于微电子机械系统（MEMS）执行器结构的非接触式三维微小力装置测量原理、装置结构、标定方法、力学特性及使用方法等进行分析。结果表明：该装置可产生空间任意方向微小力，实现空间非竖直方向微小力传感器量值溯源；利用该装置对微小力传感器进行量值溯源时，能大幅减小极板间距离测量与控制不确定度对输出微小力影响，装置无需配备复杂昂贵的位移控制与测量辅助装置便可达较高精度。对简化微小力传感器量值溯源装置结构具有较大实际意义。

Application of MEMS actuator mechanism in micro-force sensor traceability

Application of micro-force sensor is widespread in the new industries and frontier technology. The micro force traceable measurement technology has seriously lagged behind the development of its application. Measuring principle,device configuration,calibration method,mechanical properties and usage of method of non-contact 3D micro-force device based on micro-electro-mechanical system(MEMS)actuator structure are analyzed. Results show that the device can generate micro-force in any direction,and be satisfied with demand for micro-force sensor traceability with non-vertical orientation is realized. The impact of distance measurement and control uncertainty on output micro-force can be significantly reduced by the device. The device can achieve high precision without complex and expensive auxiliary equipment. It has great practical meaning to simplify device structure in micro-force sensor traceability.