硅基双轴谐振式微机械加速度计的设计与仿真

分析了谐振式微机械加速度计的工作机理,提出了一种新颖的硅基双轴谐振式微机械加速度计的结构形式。该结构采用一个质量块敏感两个正交方向的加速度,设计的弹性支撑结构巧妙地实现了正交方向的解耦,且结构稳定性好。用MATLAB软件分析了结构参数对性能指标的影响,用ISIGHT软件优化出结构参数,用ANSYS仿真软件对结构进行了静态分析和模态分析,验证了提出结构的设计思想和优化参数的可行性,设计了可实现的工艺流程。

Design and Simulation of Si-Based Dual-Axis Micromechanical Resonant Accelerometer

The work mechanism of the Si-based micromachining resonant accelerometer was discussed,and a new dual-axis resonant accelerometer structure with one proof mass was presented.A novel elasticity strutting structure was designed to decouple the two orthogonal accelerations with high structural stability.The relationship between structure dimensions on accelerometer performance was modelled by MATLAB,the structure parameters were optimized by ISIGHT,and the mechanical performance of the structure was simulated using ANSYS.The simulating results validates the design and optimization parameters are doable.The design process flow of the dual-axis accelerometer was presented.