石英微机电陀螺的频率干扰特性研究

石英微机电陀螺是一种哥氏（Coriolis）振动陀螺，其敏感芯片采用音叉式结构，工作时音叉处于谐振状态。敏感芯片具有多阶模态，前9阶模态覆盖频率为3~21 kHz。敏感芯片的部分模态易受外部振动影响而导致敏感芯片产生共振，使陀螺产生零位偏移误差，陀螺的零位偏移误差可达0.5 （°）/s。该文分析了敏感芯片模态共振误差机理，提出通过结构错频设计避免外部环境特定频率对敏感芯片的影响，从而抑制了零位偏移误差，零位偏移误差减小到约0.03 (°)/s，提高了陀螺的振动环境适应性。

Research on Frequency Interference Characteristic of Quartz MEMS Gyroscope

The quartz micro electro mechanical system (MEMS) gyroscope is a kind of Coriolis vibrating gyros. Its sensitive chip adopts a tuning fork structure, which is in a resonant state during operation. The sensitive chip has multiple modes, and the first nine modes cover the frequency from 3 kHz to 21 kHz. Some modes of the sensitive chip are susceptible to the external vibration, which causes the sensitive chip to resonate and resulting in zero offset error of gyro. The zero offset error of gyro can reach 0.5 (°)/s. In this paper, the mechanism of the modal resonance error of the sensitive chip is analyzed, and proposes a stagger frequency design in structure to avoid the influence of external specific frequency on the sensitive chip, so as to suppress the zero offset error. The zero offset error is reduced to about 0.03 (°)/s, and the adaptability of the gyro to the vibration environment is improved.