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Surface morphology of pulsed-laser deposited aluminium nitride thin films |
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| Authors: | P. G. Kotula C. B. Carter M. G. Norton |
| Affiliation: | (1) Department of Chemical Engineering and Materials Science, University of Minnesota, 55455 Minneapolis, MN, USA;(2) Department of Mechanical and Materials Engineering, Washington State University, 99164 Pullman, WA, USA |
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