| Abstract: | Transparent conducting ZnO:AI films with good adhesion, low resistivity and high transmittance have been prepared on polyptopylene adipate (PPA), polyisocyanate (PI) and polyester substrates by r.f. magnetron sputtering. The structural, electrical and optical properties of the obtained films were studied. The polycrystalline ZnO:AI films with resistivity as Iow as 5.76×10-4 Ω·cm,carrier concentration 9.06×1020 cm-a and Hall mobility 11.98 cm2 V-1s-1 were produced on PPA substrate by controlling the deposition parameters. The average transmittance of films on PPA is ～80% in the wavelength range of visible spectrum. The films on PPA substrates have better electrical and optical properties compared with the filmson other kinds of substrates. |
