| 电子束成象的研究 |
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| 引用本文： | 刘长发,吴贵儒,马菊仙.电子束成象的研究[J].自动化学报,1983,9(3):233-236. |
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| 作者姓名： | 刘长发 吴贵儒 马菊仙 |
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| 作者单位： | 1.中国科学院自动化所 |
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| 摘 要： | 本文简要介绍电子束曝光多灰级成象的方法及实验系统.在此系统上可获得三十二级以
上的图象灰度.在32mm×32mm的面积上可记录107位以上的图象信息,每位字长为8bit.
电子束束径可从数微米调至数百微米.系统可在黑白银卤片、酸敏变色片、自由基片上直接曝
光成象,且可兼容数字量及模拟量图象信息.
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| 收稿时间： | 1982-08-02 |
A Study of Electron Beam Image Recording |
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| Liu Changfa,Wu Guiru,Ma Juxian.A Study of Electron Beam Image Recording[J].Acta Automatica Sinica,1983,9(3):233-236. |
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| Authors: | Liu Changfa Wu Guiru Ma Juxian |
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| Affiliation: | 1.Institute of Automation,Academia Sinica |
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| Abstract: | In this paper the system and method of electron beam image recording is presented.
This system can give out more than 32 gray level image. About 10 M byte information are
stored in an area of 32 min×32 mm. The diameter of the spot can be adjusted from a few
micro-metre to hundreds micro-metre. Silver halid films, acid sensitive films and free
radical sensitive materials can be used to record image. This system is compatible for both
digital and analog information. |
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| Keywords: | NULL |
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