药物控释MEMS系统中微型泵的设计与仿真

本文探讨了一种医疗用微药物控释系统，对其关键器件-微型泵、微型阀进行了设计、建模和仿真。选取双金属片加热式膜片泵的模式，设计了泵的入口、泵腔、上下两片双金属加热膜片、多晶硅加热电阻、两个被动式微型阀、流体沟道和出口。全部工艺采用微型机电系统(MEMS)技术加工制作。为了确定所设计的微型泵的尺寸，对泵腔进行了模型分析，以使其在最大容积与最小的模型尺寸间达到最优。采用有限元分析法对电场热效应进行了仿真。基于仿真结果，进行了微型泵系统的加工制造。

Design and Simulation of Micro-pump in a Micro-implantable Drug Delivery MEMS

A micro-implantable drug delivery MEMS is investigated in this paper. A bimetallic heating diaphragm micro-pump and valve are the key elements of the drug delivery system, and need to select scheme of designing, modeling and simulating. Elements of the design include inlet, pump chambers, upper and lower bimetallic heating diaphragms, poly-silicon heating resistances, two check valves, flow channels and outlet. The whole manufacturing process uses MEMS technology. To determine the dimensions of the proposed micro-pump, model analysis of pump chambers is carried out. The result is that the trade-off between maximizing pump's volume and minimizing its size is the best. Furthermore, using FEA method, simulation of electric field heating effect has been done. Based on the result of simulation, the micro-pump system has been manufactured.