| 钟罩式高温烧结炉 |
| |
| 引用本文： | 魏唯. 钟罩式高温烧结炉[J]. 微细加工技术, 1998, 0(1): 55-62 |
| |
| 作者姓名： | 魏唯 |
| |
| 作者单位： | 电子工业部第４８研究所 |
| |
| 摘 要： | 研制出一台满足集成电路微组装工艺所需的高温烧结炉，介绍该烧结炉的结构组成和设计原理。
|
| 关 键 词： | 高温烧结炉，微组装工艺 |
HIGH TEMPERATURE BELL SINTERING FURNACE |
| |
| Wei Wei. HIGH TEMPERATURE BELL SINTERING FURNACE[J]. Microfabrication Technology, 1998, 0(1): 55-62 |
| |
| Authors: | Wei Wei |
| |
| Affiliation: | 48th Research Institute of Ministry of Electconics Industry Changsha 410111 |
| |
| Abstract: | A high Temperature bell sintering furnace has been developed for mi- cropackaging technology in IC fabrication. It's constitution,construction and de- sign principles are described. |
| |
| Keywords: | high tmperature sintering furnace mircopackaging technology |
| 本文献已被 CNKI 维普 等数据库收录！ |
