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Fabrication and characterization of zinc oxide piezoelectric MEMS resonator |
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| Authors: | Deshpande Prasanna P Pande Rajesh S Patrikar Rajendra M |
| Affiliation: | 1.Shri Ramdeobaba College of Engineering and Management, Nagpur, India ;2.Visvesvaraya National Institute of Technology, Nagpur, India ; |
| Abstract: | Microsystem Technologies - Micro electromechanical system resonators (MEMS) are being explored to fulfil the demands of speedy wireless communication circuits, which may be utilized as oscillators... |
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