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Fabrication of coplanar microheater platform for LPG sensing applications
Authors:Bagga  Shobi  Akhtar  Jamil  Mishra  Sanjeev  Preeti
Affiliation:1.Rajasthan Technical University, Kota, Rajasthan, India
;2.School of Electrical, Electronics & Communication Engineering, Manipal University Jaipur (MUJ), Jaipur, Rajasthan, India
;
Abstract:Microsystem Technologies - The design and fabrication of nichrome based coplanar microheater for LPG sensing applications is presented in this work. Nichrome based coplanar microheater is...
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