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Direct laser writing to fabricate capacitively transduced resonating sensor |
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| Authors: | Pachkawade Vinayak Cerica Delphine Dricot Samuel Stoukatch Serguei Kraft Michael |
| Affiliation: | 1.Department of Electrical Engineering and Computer Science, University of Liege, 4000, Liege, Belgium ;2.Microsystem Laboratory, University of Liege, 4102, Seraing, Belgium ;3.Department of Electrical Engineering (ESAT), KULeuven, 3001, Louvain, Belgium ; |
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