A silicon resonant sensor structure for Coriolis mass-flowmeasurements

We present the first mass-flow sensor in silicon, based on the Coriolis-force principle. The sensor consists of a double-loop tube resonator structure with a size of only 9×18×1 mm. The tube structure is excited electrostatically into a resonance-bending or torsion vibration mode. A liquid mass flow passing through the tube induces a Coriolis force, resulting in a twisting angular motion phase shifted and perpendicular to the excitation. The excitation and Coriolis-induced angular motion are detected optically. The amplitude of the induced angular motion is linearly proportional to the mass flow and, thus, a measure thereof. The sensor can be used for measurement of fluid density since the resonance frequency of the sensor is a function of the fluid density. The measurements show the device to be a true mass-flow sensor with direction sensitivity and high linearity in the investigated flow range of as low as 0-0.5 g/s in either direction. A sensitivity of 2.95 (mV/V)/(g/s) and standard deviation for the measured values of 0.012 mV/V are demonstrated