基于光纤信号传输的准分子激光器控制系统

为了解决准分子激光器在工作时产生的电磁干扰对激光器控制系统信号的影响,利用光纤的抗电磁干扰特性,采用光纤进行信号的传输,研制了用于信号传输的模拟和数字光纤传输模块和基于该模块的嵌入式准分子激光器控制系统。经测试,该系统模拟通道的-3dB带宽为直流到3MHz,非线性误差最大为1.2%,激光器在工作过程中,控制系统工作稳定、可靠。结果表明,该系统具有很好的抗电磁干扰能力。

Development of controller for excimer laser based on optical fiber

To solve the problem of that the electromagnetic interference (EMI) induced by a working excimer laser, which might affect the signal of the laser control system, the analog and digital optical fiber models for signal transmission and embedded eximer laser control system were designed by transmitting the signals with optical fibers for their character of immunity to EMI. It was proved that the system's analog channel's-3dB bandwidth was DC-3MHz,its max nonlinearity was 1.2%, and the control system was stable and reliable while the excimer laser working. Experiment results indicate that this system have good character of immunity to EMI.