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On the metallic bonding of GaN-based vertical light-emitting diode
Affiliation:1. School of Microelectronics, Shandong University, Jinan 250100, China;2. School of Physics, Shandong University, Jinan 250100, China;3. School of Science, Xi''an Polytechnic University, Xi''an 710048, China
Abstract:In this work, metallic bonding in GaN-based vertical light-emitting diode (VLED) is systematically characterized by using combined methodology of transmission Kikuchi diffraction (TKD) and energy dispersive X-ray spectroscopy (EDS) in a scanning electron microscope (SEM). SEM-based TKD with EDS identifies chemical composition, grain morphology, orientation, and phases at metallic bonding, while transmission electron microscopy (TEM) provides nanoscale characteristics of metallic diffusion bonding, and its interface-related defects and nano-twinned boundaries. Our results from SEM-TKD and TEM techniques provide unparalleled insight into the metallic bonding, and its future optimization.
Keywords:GaN  Vertical light-emitting diode (VLED)  Metallic bonding  Transmission Kikuchi diffraction (TKD)
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