Optical and structural properties of CuCrO2 thin films on c-face sapphire substrate deposited by reactive RF magnetron sputtering |
| |
| Affiliation: | 1. Graduate School of Engineering, Tohoku University, 6-6-05 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan.;2. Research Fellow of Japan Society for the Promotion of Science, Koji-machi Business Center Building, 5-3-1 Koji-machi, Chiyoda-ku, Tokyo 102-0083, Japan.;1. Department of Innovative and Engineered Materials, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8502, Japan;2. Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan;3. Materials Research Center for Element Strategy, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8502, Japan;4. Synchrotron X-ray Station at SPring-8, National Institute for Materials Science (NIMS), Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan;5. Japan Synchrotron Radiation Research Institute (JASRI), Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan;6. Department of Materials and Life Sciences, Sophia University, Chiyoda, Tokyo 102-8554, Japan;7. Department of Materials Science and Engineering, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama 226-8502, Japan;1. Solid State Physics Division, Bhabha Atomic Research Centre, Mumbai 400085, India;2. Homi Bhabha National Institute, Anushaktinagar, Mumbai 400094, India;3. Chemistry Division, Vignan''s Foundation for Science, Technology and Research, Guntur, Andhra Pradesh 522213, India;4. Chemistry Division, Bhabha Atomic Research Centre, Mumbai 400085, India;1. Department of Physics, Faculty of Science, Khon Kaen University, Khon Kaen 40002, Thailand;2. Materials Science and Nanotechnology Program, Faculty of Science, Khon Kaen University, Khon Kaen 40002, Thailand;3. Synchrotron Light Research Institute (Public Organization), 111 University Avenue, Muang District, Nakhon Ratchasima 30000, Thailand;4. Nanotec-KKU Center of Excellence on Advanced Nanomaterials for Energy Production and Storage, Khon Kaen 40002, Thailand;5. Integrated Nanotechnology Research Center (INRC), Khon Kaen University, Khon Kaen 40002, Thailand;1. Department of Materials Science and Engineering, National Chung Hsing University, Taichung 40227, Taiwan, ROC;2. Department of Mechanical Engineering, National Chin-Yi University of Technology, Taichung 411, Taiwan, ROC;1. Convergence Research Center for Solar Energy, Daegu Gyeongbuk Institute of Science & Technology (DGIST), Daegu 42988, Republic of Korea;2. School of Materials Science and Engineering, Kyungpook National University, Daegu 41566, Republic of Korea;3. KNU Advanced Material Research Institute, Kyungpook National University, Daegu 41566, Republic of Korea;1. School of Electrical Engineering, Shanghai Dianji University, Shanghai 201306, China;2. Department of Electronic Engineering, East China Normal University, Shanghai 200241, China |
| |
| Abstract: | Reactive sputtering with Ar/N2 mixture gas was introduced to improve stoichiometry of p-type transparent CuCrO2 films, and effects of N2 partial pressure ratio (αN) on optical and structural properties were investigated. Film composition was changed from Cu rich (i.e. Cr poor) to Cr rich (i.e. Cu poor) by N2 addition, and the stoichiometric film was grown at αN of about 20%. Although N atoms were not incorporated into the films from analyses of crystal structure and chemical bonding state, both transmittance from visible to near-infrared wavelength and crystallinity were improved at αN up to 10%. These improvements were attributed to suppression of the CuO formation and promotion of the O-Cu-O dumbbell bonds formation. This was confirmed by the decrease of diffraction intensity from CuO and the increase of vibrational intensity corresponding A1g mode. From these results, it can be considered that N atoms decreased not only Cu but also excess O in the film. At αN of 20% or above, transmittance at wavelength of 450 nm and crystallinity deteriorated. This is supposed that excessive N2 addition probably generated both O and Cu deficiencies. As a result, it was found that slightly Cu-rich composition is suitable to obtain high-transparency CuCrO2 thin films for practical use. |
| |
| Keywords: | Delafossite oxides C-Face sapphire substrate Reactive RF magnetron sputtering Stoichiometry Optical transmittance |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
