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铁电薄膜渐增式脉冲极化系统
引用本文:李少康,吴小清,任巍.铁电薄膜渐增式脉冲极化系统[J].西安工业大学学报,2007,27(6):523-526.
作者姓名:李少康  吴小清  任巍
作者单位:西安交通大学电子材料与器件研究所,西安交通大学电子材料与器件研究所,西安交通大学电子材料与器件研究所 西安710049,西安工业大学机电工程学院,西安710032,西安710049,西安710049
摘    要:为了改善加热直流电压极化以及等幅脉冲电压极化两种极化方法的不足,提出了渐增式脉冲极化方法.阐述了该方法的原理并组建了系统,整个系统由计算机、数模转换卡、功率放大器和极化探针台等组成.详细介绍了脉冲宽度和幅值的控制方法,解决了Windows系统下窄脉冲的精确定时问题.制备了PT薄膜样品,并在系统上进行了样品极化实验.结果表明,该方法的极化效率在与等幅式脉冲极化持平时,可将样品击穿率降低20%.

关 键 词:铁电薄膜  热极化  脉冲极化  MOD法
文章编号:1673-9965(2007)06-523-04
收稿时间:2007-10-09
修稿时间:2007年10月9日

A Stepwise Pulse Poling System for Ferroelectric Thin Films
Authors:LI Shao-kang  WU Xiao-qing  REN Wei
Abstract:A stepwise pulse poling method was revealed for amending poling effect of hot DC poling process and equal pulse poling process.Its principle was presented and corresponding poling system was developed.The system was made up of computer,D/A converter,power amplifier and probe station.Regulations of width and amplitude of poling pulses were explained particularly.The problem of accuracy of narrow pulse width controlling under Windows was solved.PT thin films were prepared and poled on the stepwise poling system.The results showed that stepwise pulse technique could reduce the breakdown rate of thin films during poling 20% when its poling efficiency equals equal pulse poling's.
Keywords:ferroelectric thin films  hot DC poling  pulse poling  MOD method
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