简谐波运动理论在物体曲面形貌测量中的应用

在物体曲面形貌非接触式测量中,传统的N步相移技术在实施测量时必须采用精密的移相装置,以获得定步长的相移步进值,当存在相移步进偏差时,就不能够准确的解调出相位.针对这种情况,本文在分析简谐波运动的基础上,提出了一种通过点测量的方式提取相移光栅实际相移量方法,同时提出了一种基于非定步长的相移相位恢复算法;实验结果表明:通过该方法获取的相移步长的精度达到纳米级,利用该非定步长算法能够准确的解调出相位,降低了对移相装置的精度要求,大大提高了测量系统的精度和自动化程度.

The application of the simple-harmonic wave's theory in the measurement of the 3-D object sharps

Traditionally,in the untouched measurement of the 3-D object shapes,N-steps phase-shift algorithm must adopt the precise shifter to achieve phase-shift step length.If there are errors in the phase-shift steps,the phase of the 3-D object sharp cannot be calculated accurately.Therefore,this paper proposes a new method to acquire grating phase shift steps by the single point measure,which is based on the Simple-harmonic wave's theory,and at the same time a new undecided step phase shift algorithm is put forward.The experimental data show that the algorithm can calculate the shift phase accurately,and the precision of the measured shift phase is up to 10-9 meter.This algorithm can also greatly reduce the demands of the equipment and increase the automation in the measurement.