| 状态反馈法改善MEMS静电驱动结构瞬时特性的研究 |
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| 引用本文： | 冯仁剑,于尚民,万江文,吴银锋. 状态反馈法改善MEMS静电驱动结构瞬时特性的研究[J]. 传感技术学报, 2006, 19(5): 1337-1339,1343 |
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| 作者姓名： | 冯仁剑 于尚民 万江文 吴银锋 |
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| 作者单位： | 北京邮电大学自动化学院,测控与通信微系统研究中心,北京,100876;北京邮电大学自动化学院,测控与通信微系统研究中心,北京,100876;北京邮电大学自动化学院,测控与通信微系统研究中心,北京,100876;北京邮电大学自动化学院,测控与通信微系统研究中心,北京,100876 |
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| 基金项目： | 教育部跨世纪优秀人才培养计划 |
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| 摘 要： | MEMS静电驱动结构的瞬时特性受其结构本身机械动态特性的影响,自然阻尼过高或者过低都可能会让系统发生操作偏差.利用状态空间分析法分析了MEMS静电驱动结构的工作机理.基于状态反馈原则设计了一种输入量控制方法,即根据系统要求指标来配置极点,实现最优控制.仿真实验结果证明,该方法能提高系统的瞬时特性.
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| 关 键 词： | MEMS静电驱动 瞬时特性 状态反馈 输入量控制 状态空间 |
| 文章编号： | 1004-1699(2006)05-1337-03 |
| 修稿时间： | 2006-07-01 |
Study on Improvement of Transient Response of EletrostaticallyActuated MEMS: An State Feedback Viewpoint |
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| FENG Ren-jian,YU Shang-min,WAN Jiang-wen,WU Yin-feng. Study on Improvement of Transient Response of EletrostaticallyActuated MEMS: An State Feedback Viewpoint[J]. Journal of Transduction Technology, 2006, 19(5): 1337-1339,1343 |
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| Authors: | FENG Ren-jian YU Shang-min WAN Jiang-wen WU Yin-feng |
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| Affiliation: | Beijing University of Posts and Telecommunications, Beijing 100876, China |
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| Abstract: | Transient response of electrostatically-actuated MEMS is dominated by their mechanical dynamics. The performance of such system may be poor, if the natural damping of the system is very low or very high. The work mechanics of the electrostatically-actuated MEMS is discussed based on the state space method. Based on the state feedback, one input control strategy is presented to implement optimum control, which allocates poles according to the system requirements. The simulation results demonstrate that the improvement of transient behavior is achieved by proposed strategy. |
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| Keywords: | electrostatically actuated MEMS transient behavior state feedback input control state space |
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