硅基光波导材料的研究

光波导是集成光路及其元器件中最基本的构成单元。本文介绍了各种不同类型的光波导材料的特性。硅材料作为目前研究得最透彻的半导体材料,它在光电子领域的应用也是令人关注的。硅基光波导材料种类繁多,主要包括聚合物、外延硅/重掺杂硅、SiO₂,SOI和SiGe/Si等。硅基光波导材料是实现硅基光波导器件的基础,本文阐明了它们各自的特点和应用前景。其中聚合物、SiO₂和SOI波导是目前研究的热点。

Research on silicon-based optical waveguide materials

The optical waveguide is the basic unit to make up optical circuit and devices.The performances of different optical waveguide materials are reviewed.Silicon is the most common and familiar semiconductor material at the present research which has attracted many attentions in optoelectronic domain.There are many kinds of silicon-based optical waveguide materials,including polymer,epitaxial/adulterate silicon,SiO₂,SOI and SiGe/Si etc.They can realize silicon-based optical waveguide devices.In this paper,properties and prospects of applications of different optical waveguide materials are reviewed.Among the materials polymer SiO₂ and SOI are research hotspot at present.