Reduction in absorption in quartz/Si,quartz/Si/SiO2, and SiC/Si/SiO2 structures on laser treatment |
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| Authors: | V. N. Lissotschenko R. V. Konakova B. G. Konoplev V. V. Kushnir O. B. Okhrimenko A. M. Svetlichnyi |
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| Affiliation: | 1.LIMO-Lissotschenko-Mikrooptik GmbH,Dortmund,Germany;2.Lashkarev Institute of Semiconductor Physics,National Academy of Sciences of Ukraine,Kyiv,Ukraine;3.Taganrog Institute of Technology,South Federal University,Taganrog,Russia |
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| Abstract: | The effect of laser radiation on the optical absorption spectra of the quartz/Si, quartz/Si/SiO2, and SiC/Si/SiO2 systems is studied. The effects of modification of the transparency of the structures are clarified. |
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