大行程高精度驱动系统的研究

首先对大行程高精度驱动系统结构研究进展进行介绍和评述,其次针对目前大行程高精度宏微两级定位系统结构复杂,体积大,驱动控制困难等问题,提出研究具有宏微双重运动功能的单一驱动结构将是大行程高精度驱动定位系统的发展方向;指出将超声电机与压电微驱动器结合成为单一驱动器将是大行程高精度驱动系统的一个发展方向;最后对单级超声电机宏微驱动系统建模方法、位置控制策略的研究进展进行了综述,指出了单级宏微驱动的超声电机研究的主要难点。

Advances in Large-stroke and High-resolution Drive System

Large-stroke and high-resolution drive position system is one of the key technology for precision positioning.This paper reviews the advances in the study of large-stroke and high-resolution drive system structure.And then for the problems of complex structure,big volume and drive control difficulty for large-stroke and high-resolution macro/micro two-stage positioning system,it is proposed that the research on a single-stage structure which has dual function of micro/macro motion will be the development direction of large-stroke and high-resolution drive positioning system,and the ultrasonic motor as a single driver will be a research topic of the single stage macro/micro drive system.Finally,the development of modeling method and position control strategy of the single stage ultrasonic motor macro/micro drive system are reviewed and difficulties in the research of modeling and control for single stage ultrasonic motor are suggested.