半导体集成电路生产中的洁净技术

文章对半导体集成电路生产中可能接触到的主要污染物类型及造成污染的主要原因做了详细介绍。为减少对半导体集成电路的污染，必须保证半导体集成电路的生产在高度洁净的环境中进行。集成电路制造业是一个在超净化环境中，使用超纯材料，进行超微细加工的产业。文章还对各种洁净标准做了详细介绍。随着集成电路生产目前进入深亚微米及纳米级工艺加工阶段，工艺参数以及图形线宽也发生了变化，因此对洁净度等级、工艺中所使用的材料品种和纯度指标的要求还在不断提升。

Cleaning Technology in Production of Semiconductor Integrated Circuits

This article introduces in detail the main types of contaminants and the possible causes exist-ing in production of semiconductor integrated circuits. In order to reduce such kind of contamination, itis necessary to guarantee the production of semiconductor integrated circuits in a highly cleanenvironment. IC manufacturing industry is a super fine processing industry using super purified mate-rials in a super clean environment. The paper gives a detailed introduction about various cleanroomstandards. As IC fabrication has come into sub-micro and nanometer processing stage, which results inthe change in process parameters, pattern and line width, the cleanliness classes, the variety and thepurification index of materials used are also increasingly upgrading.