Micro-structured electrode arrays: Glow discharges in Ar and N2 at atmospheric pressure using a variable radio frequency generator |
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| Authors: | Christian Schrader, Lutz Baars-Hibbe, Karl-Heinz Gericke, Eduard Marinus van Veldhuizen, Nina Lucas, Philipp Sichler,Stephanus Bü ttgenbach |
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| Affiliation: | aInstitut für Physikalische and Theoretische Chemie, Technische Universitt Braunschweig, Hans-Sommer Str. 10, D-38106 Braunschweig, Germany;bDepartment of Physics, Technische Universiteit Eindhoven, Den Dolech 2, 5612 AZ Eindhoven, The Netherlands;cInstitut für Mikrotechnik, TU Braunschweig, Alte Salzdahlumer Str. 20, D-38124 Braunschweig, Germany |
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| Abstract: | Micro-structured electrode (MSE) arrays consist of an interlocked, comb-like, capacitive electrode system with gap widths in the μm range. Large-area uniform glow discharges up to atmospheric pressure were penetrated with our arrays. In order to ignite glow discharges at atmospheric pressure this approach is established next to using dielectric barrier arrays and plasma jets. Because of the industrial, scientific and medical (ISM) limitation of available radio frequencies the usual frequency for experiments is 13.56 MHz. Using a variable radio frequency generator more information about the frequency dependent breakdown mechanisms are gained. The electric parameters of the non-thermal plasma system are characterized by a special probe with an upper frequency detection limit of 60 MHz. |
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| Keywords: | Micro-structured electrode arrays Glow discharge Atmospheric pressure Radiofrequency Paschen curves |
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