| Abstract: | This paper analyses the three‐dimensional (3‐D) surface texture of growing diamond nanocrystals on Au thin films as catalyst on p‐type Si substrate using hot filament chemical vapour deposition (HFCVD). Rutherford backscattering spectrometry (RBS), atomic force microscopy (AFM), Raman, X‐ray diffraction (XRD) and scanning electron microscopy (SEM) analyses were applied also to characterize the 3‐D surface texture data in connection with the statistical, and fractal analyses. This type of 3‐D morphology allows a deeper understanding of structure/property relationships and surface defects in prepared samples. Our results indicate a promising way for preparing high‐quality diamond nanocrystals on Au thin films as catalyst on p‐type Si substrate via HFCVD method. |
