| Ni-Mn-Ga铁磁性形状记忆薄膜研究进展 |
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| 引用本文： | 陈峰华,张敏刚,柴跃生,张真真. Ni-Mn-Ga铁磁性形状记忆薄膜研究进展[J]. 微纳电子技术, 2010, 47(8). DOI: 10.3969/j.issn.1671-4776.2010.08.004 |
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| 作者姓名： | 陈峰华 张敏刚 柴跃生 张真真 |
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| 作者单位： | 太原科技大学,太原,030024 |
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| 基金项目： | 山西省自然科学基金，山西省研究生创新基金，太原市大学生创新创业专题项目 |
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| 摘 要： | Ni-Mn-Ga合金兼有铁磁性和形状记忆效应,有望成为继压电陶瓷和磁致伸缩材料之后的新一代驱动与传感材料。但是由于合金脆性较大,难以切割,限制了其在微机电系统中的应用。系统阐述了薄膜的化学成分、组织结构、相转变、形状记忆效应及其影响因素,指出目前Ni-Mn-Ga合金薄膜研究中,各个元素对性能影响的探索存在不足,制备出的薄膜主要存在磁性能、磁致应变量偏低以及磁致形状记忆效应不可逆等缺点。可以通过调整薄膜化学成分、热处理工艺、膜厚或者元素替换来提高薄膜的性能。
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| 关 键 词： | Ni-Mn-Ga薄膜 铁磁性 形状记忆效应 传感材料 相转变 |
Progress of Ni-Mn-Ga Ferromagnetic Shape Memory Films |
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| Chen Fenghua,Zhang Mingang,Chai Yuesheng,Zhang Zhenzhen. Progress of Ni-Mn-Ga Ferromagnetic Shape Memory Films[J]. Micronanoelectronic Technology, 2010, 47(8). DOI: 10.3969/j.issn.1671-4776.2010.08.004 |
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| Authors: | Chen Fenghua Zhang Mingang Chai Yuesheng Zhang Zhenzhen |
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| Affiliation: | Chen Fenghua,Zhang Mingang,Chai Yuesheng,Zhang Zhenzhen(Taiyuan University of Science and Technology,Taiyuan 030024,China) |
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| Abstract: | The Ni-Mn-Ga alloy has both ferromagnetism and shape memory effect,and is expected to become a new smart actuator or sensor material following the piezoelectric ceramics and magnetostrictive materials in the future.However,the alloy is difficult to machine because of its high brittleness,which restricts its application for micro-electromechanical systems(MEMS).The chemical composition,structure,phase transition and shape memory effect of thin films and their influence factors are systematically summarized.I... |
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| Keywords: | Ni-Mn-Ga thin film ferromagnetism shape memory effect sensor material phase transition |
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