两端固支微开关梁中的轴力效应分析

根据考虑轴力的两端固支梁挠曲线微分方程,将受电场力作用的两端固支微开关梁的挠度求解问题归结为求解含有未知边界条件的微分方程问题,通过将微分方程的数值解法和一种三重二分迭代求解方法相结合,实现对含有未知边界条件的挠度微分方程问题的数值求解,再通过和优化方法相结合实现失稳挠度及吸合电压的自动计算与识别.给出的部分计算结果包括,不同的梁高下轴力对吸合电压的影响、轴力对失稳挠度的影响、不同的初始驱动电极间隙下轴力对吸合电压的影响、梁高对失稳时轴力引起的应力的影响等.

ANALYSIS TO EFFECT OF AXIAL FORCE ON MEMS SWITCH CONSISTING OF A CLAMPED-CLAMPED BEAM

Based on the governing differential equation for the elastic curve of a clamped-clamped beam with axial force,the determination of the elastic curve of the beam subjected to the electrostatic force is changed into the determination of a differential equation with unknown boundary conditions.Incorporating the numerical method to the differential equation with a three-fold method of bisection,the differential equation with unknown boundary conditions can be determined by the combination numerical method.Incorporating the above combination numerical method again with some optimization method,the collapse deflection and the pull-in voltage can be obtained automatically by a computer.Some results are given,including the effect of the axial force on the pull-in voltage for different depths of the beam,the effect of the axial force on the collapse deflection,the effect of axial force on the pull-in voltage for the different initial gaps between the two actuating electrodes,the effect of the depth of the beam on the stress caused by axial force at the collapse deflection.