| 声表面波器件用Pb[(Mn_(1/3)Nb_(2/3))_xZr_yTi_(1-x-y)]O_3压电陶瓷材料的研制 |
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| 引用本文： | 魏敏敏,顾峰,谢为一. 声表面波器件用Pb[(Mn_(1/3)Nb_(2/3))_xZr_yTi_(1-x-y)]O_3压电陶瓷材料的研制[J]. 压电与声光, 1992, 0(3) |
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| 作者姓名： | 魏敏敏 顾峰 谢为一 |
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| 作者单位： | 上海科学技术大学材料工程系(魏敏敏，顾峰)，上海无线电一厂(谢为一) |
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| 摘 要： | 声表面波器件用铌锰锆钛酸铅系压电陶瓷材料,采用真空烧结工艺来提高陶瓷致密度,改善表面光洁度。添加CeO_2抑制晶粒生长,制得了小于2μm微晶压电陶瓷材料。进一步改善陶瓷材料的表面光洁度,样品经抛光后得表面最大孔洞小于0.5μm,适宜制作38MHz的声表面波滤波器件。
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| 关 键 词： | 压电陶瓷材料 铌锰锆钛酸铅系 真空烧结 声表面波器件 |
Development of Pb[(Mn_(1/3)Nb_(2/3))_xZr_yTi_(1-x-y)]O_3 Piezoelectric Ceramic Material for SAW Devices |
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| Wei Minmin Gu Feng. Development of Pb[(Mn_(1/3)Nb_(2/3))_xZr_yTi_(1-x-y)]O_3 Piezoelectric Ceramic Material for SAW Devices[J]. Piezoelectrics & Acoustooptics, 1992, 0(3) |
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| Authors: | Wei Minmin Gu Feng |
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| Abstract: | The piezoelectric ceramic density and surface smoothness as well as the properties of Pb [Mn1/3Nb2/3)xZryTi1-x-y]O3 system were improved by vacuum sintering technology.lt was used as a substrate material for SAW devices. The grain growth was restrained by doping CeO2. Consequently,fine grain (<2um) was obtained as well as further improving of surface smoothness of ceramics. The biggest pits on the polished surface of sample is about 0.3um. This material is suitable for manufacturing 38MHz SAW devices. |
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| Keywords: | piezoelectric ceramics Pb[(Mn1/3Nb2/3)xZry Ti1-x-y]O3 system vacuum sintering SAW device |
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