| 飞秒激光玻璃微加工技术 |
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| 引用本文： | 彭志农,贾威,王清月.飞秒激光玻璃微加工技术[J].纳米技术与精密工程,2008,6(2):114-117. |
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| 作者姓名： | 彭志农 贾威 王清月 |
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| 作者单位： | 天津大学精密仪器与光电子工程学院,天津,30072 |
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| 基金项目： | 教育部科学技术研究重点项目
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天津市科技发展基金
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国防重点实验室基金 |
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| 摘 要： | 为了研究飞秒激光作用下光学玻璃内部发生的改性过程，利用重复频率为1kHz、中心波长为775am、脉宽为130fs的飞秒激光对光学玻璃进行微加工．结果表明，激光辐照区发生永久性折射率改变，并且玻璃的改性线宽随着激光功率的增加而增加，随激光扫描速度的降低而增加．根据飞秒激光致使光学玻璃发生改性的特点，利用飞秒激光在光学玻璃内部直接刻写了相位光栅和二维图案，研究了相位光栅的衍射特性．
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| 关 键 词： | 飞秒激光 光学玻璃 微加工 |
| 文章编号： | 1672-6030（2008）02-0114-04 |
| 收稿时间： | 2007-08-16 |
| 修稿时间： | 2007年8月16日 |
Micromachining in Glass with Femtosecond Laser |
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| PENG Zhi-nong,JIA Wei,WANG Qing-yue.Micromachining in Glass with Femtosecond Laser[J].Nanotechnology and Precision Engineering,2008,6(2):114-117. |
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| Authors: | PENG Zhi-nong JIA Wei WANG Qing-yue |
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| Affiliation: | (School of Precision Instrmnent and Opto-Electronics Engineering, Tianjin University, Tianjin 300072, China) |
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| Abstract: | To investigate the femtosecond laser modification in optical glass, a commercial femtosecond laser system, which produced 130 fs pulses at a wavelength of 775 nm and a repetition rate of 1 kHz, was used in micromachining in glass. The results show that pennanent refractive-index change is induced by illumination with high-power laser, and the width of the modified line increases with the laser power increasing and the scanning velocity decreasing. And then a phase grating and 2D logo were fabricated in glass using a femtosecond laser to study its diffraction character experimentally. |
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| Keywords: | femtosecond laser optical glass micromachining |
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