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Ion beam mixing of titanium films on stainless steel |
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| Authors: | Wolfgang Bolse Thomas Weber and Wolfgang Lohmann |
| Affiliation: | 1 II. Physikalisches Institut, Universität Götlingen, D-3400, Göttingen, FRG 2 AKZO Research Laboratories Obernburg, D-8753, Obernburg, FRG |
| Abstract: | The ion mixing of Ti-steel bilayers with N+, Ar+, Ti+, Kr+ and Xe+ ions was investigated by means of Rutherford backscattering spectroscopy (RBS). The mixing rates exhibit a linear scaling with the deposited damage energy fD. No correlation between the properties of the mixing ion and the mixing efficiency was found. The results are compared with the predictions of ballistic and thermal-spike models. |
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