| 基底元素表面富集与扩散阻档层 |
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| 引用本文： | 刘友婴,李望,展振宗.基底元素表面富集与扩散阻档层[J].真空科学与技术学报,1994(4). |
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| 作者姓名： | 刘友婴 李望 展振宗 |
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| 作者单位： | 天津南开大学电子科学系!天津300071(刘友婴)，天津理化工程研究院!300180(李望，展振宗) |
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| 摘 要： | 根据An－Ag系统以及An－Cu系统的扩散系数计算，提出了扩散阻挡层模型。利用这个模型对Au－Ag系统进行有关实验，得利了较好的验证。
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| 关 键 词： | 元素表面富集 扩散系数 扩散阻档层 电负性 汽化热 |
SUBSTRATE ELEMENT SURFACE ENRICHMENT AND DIFFUSION BARRIER |
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| Liu Youying.SUBSTRATE ELEMENT SURFACE ENRICHMENT AND DIFFUSION BARRIER[J].JOurnal of Vacuum Science and Technology,1994(4). |
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| Authors: | Liu Youying |
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| Abstract: | According to the calculation results of diffusion coefficients for An-Ag and Au-Cu systems the model of diffusion barrier has been proposed in this paper and using the model of diffusion barrier the relative experiments of barrier for the Au-Ag system have been done. It can be obtained from the experiments that the model has been verified quite well for the Au- Ag system. |
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| Keywords: | Element surface enrichment Diffusion coefficient Diffusion barrier Electronegativity Vaporization heat |
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